JEOL Ltd. (TOKYO:6951) (www.jeol.com) (President & COO Izumi Oi) announces the release of a new Schottky field emission scanning electron microscope, JSM-F100 in August 2019.
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https://www.jeol.co.jp/en/news/detail/20190804.3456.html
Background
Scanning electron microscopes(SEMs) are used in various fields; nanotechnology, metals, semiconductors, ceramics, medicine, and biology. With application expansion, SEM users are in need of fast high-quality data acquisition and simple compositional information confirmation with seamless operation.
The JSM-F100 incorporates our highly regarded In-lens Schottky Plus FE electron gun and "Neo Engine"(electron optical control system) as well as a new GUI "SEM Center" and an innovative "LIVE-AI(Live Image Visual Enhancer-Artificial Intelligence) filter". This enables an optimal combination of high-spatial-resolution imaging and operability. Furthermore, a standard JEOL energy dispersive X-ray spectrometer(EDS) is fully integrated within "SEM Center" for seamless acquisition from images to elemental analysis results. The JSM-F100 achieves superb work efficiency, 50% or higher than that of our previous JSM-7000 series, realizing dramatically-increased high throughput.
Features
1. In-lens Schottky Plus FE electron gun Enhanced integration of the electron gun and low-aberration condenser lens provides higher brightness. Ample probe current at low accelerating voltage supports various capabilities from high-resolution imaging to high-speed elemental mapping.
2. Hybrid Lens(HL) The Hybrid Lens(HL), combining the electrostatic and magnetic field lens, supports high-spatial-resolution imaging and analysis of various specimens.
3. Neo Engine(New Electron Optical Engine) Neo Engine, a cutting-edge electron optical control system, significantly improves the precision of automatic functions and operability.
4. New function of "SEM Center" A new operation GUI "SEM Center" fully integrates SEM imaging and EDS analysis and provides next-generation operability and high-resolution images obtained with FE-SEM.
5. New "Zeromag" function "Zeromag", incorporated for seamless transition from optical to SEM imaging, makes it easy to locate the target specimen area.
6. New LIVE-AI filter* Utilizing the AI(artificial intelligence) capability, LIVE-AI filter is incorporated for a higher quality of live images. Unlike image integration processing, this new filter displays a seamless moving live image with no residual image and is very effective for quickly searching observation areas, focusing, and stigmator adjustment. *optional
| Specifications | |
|---|---|
| Resolution(1 kV) | 1.3 nm |
| Resolution(20 kV) | 0.9 nm |
| Accelerating voltage | 0.01 to 30 kV |
| Standard detectors | Upper Electron Detector(UED), Secondary Electron Detector(SED) |
| Electron gun | In-lens Schottky Plus FE electron gun |
| Probe current | A few pA to 300 nA(30 kV) A few pA to 100 nA(5 kV) |
| Objective lens | Hybrid Lens(HL) |
| Specimen stage | Full eucentric goniometer stage |
| Specimen movement | X: 70 mm, Y: 50 mm, Z: 2 to 41 mm Tilt: –5 to 70°, Rotation: 360° |
| EDS detector | Energy resolution: 133 eV or less Detectable elements: B(boron) to U(uranium) Detection area: 60 mm2 |
Annual unit sales target
60 units/year
JEOL Ltd. 3-1-2, Musashino, Akishima, Tokyo, 196-8558, Japan Izumi Oi, President & COO (Stock code:6951, Tokyo Stock Exchange First Section) www.jeol.com
View source version on businesswire.com: https://www.businesswire.com/news/home/20190804005010/en/
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Contacts
JEOL Ltd. Science and Measurement Instruments Sales Division Kazunori Kitazumi +81-3-6262-3567 https://www.jeol.co.jp/en/support/support_system/contact_products.html