Versum Materials and NuMat Technologies to Commercialize Next-Generation Adsorbent Technology for Delivery of Dopant Gases
Versum Materials, Inc. (NYSE: VSM), a leading global materials supplier to the semiconductor industry, and NuMat Technologies, a pioneer in the design and integration of atomically-engineered materials into gas delivery, separation and purification systems, today announced a global, commercial agreement to offer a new line of products for the safe storage and delivery of dopant gases such as arsine, phosphine and boron trifluoride.